Fabrication of TiZrN wear-resistant thin films by reactive rf magnetron sputtering
141 viewsDOI:
https://doi.org/10.54939/1859-1043.j.mst.VITTEP.2022.72-78Keywords:
Magnetron sputtering rf; TiZrN films; The microhardness; The friction factor; The volume wear.Abstract
These wear-resistant coatings based on TiN films have potential applications in the mechanical and defense industries. In this study, I studied the fabrication of TixZr1-xN film by rf magnetron reactive sputtering on titanium substrates (VT1-0), the influence of N2 gas concentration in the N2/Ar gas mixture on the mechanical and tribological properties of layers, namely microhardness by Knoop method, friction factor, volume wear by abrasive method and thickness of films by light interference method. The results showed that the mechanical and frictional properties of TixZr1-xN films are affected by the concentration of N2 gas in the N2/Ar working gas mixture, the sputtering rate of film formation, and the annealing process after heat treatment. At a concentration of N2 in the N2/Ar gas mixture 6-8%, the formation of a film of uniform thickness with a microhardness of up to 25.69 GPa, a friction factor lower than 0.15 and an volume wear, is ensured 10-7 mm lower. The study demonstrated that the addition of elemental Zr to the TiN films improves the properties of the thin film.
References
[1]. Голосов Д.А. и др., “Физико-механические и триботехнические характеристики пленок нитрида титана-алюминия”, 13-я Международная конференция “Взаимодействие излучений с твердым телом”, cекция 3: Модификация свойств материалов, c. 235-238, (2019).
[2]. Cui-feng Wang, Shin-fu Ou, Shi-yung Chiou, “Microstructures of TiN, TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering”, Trans. Nonferrous Met. Soc. China, Vol. 24, pp. 2559-2565, (2014). DOI: https://doi.org/10.1016/S1003-6326(14)63383-5
[3]. Kawate M. et al., “Oxidation resistance of Cr1-xAlxN and Ti1-xAlxN films”, Surf. Coat. Technol., Vol.165 (2), pp. 163-167, (2003). DOI: https://doi.org/10.1016/S0257-8972(02)00473-5
[4]. Yu-Wei Lin et al., “Structure and Properties of Nanocrystalline (TiZr)xN1−x Thin Films Deposited by DC Unbalanced Magnetron Sputtering”, Journal of Nanomaterials, Vol. 2016, pp. 354-366, (2016). DOI: https://doi.org/10.1155/2016/2982184
[5]. Zhirkov I. et al., “Effect of Cathode Composition and Nitrogen Pressure on Macroparticle Generation and Type of Arc Discharge in a DC Arc Source with Ti-Al Compound Cathodes”, Surface & Coatings Technology, Vol.281, pp.20 -26. DOI: https://doi.org/10.1016/j.surfcoat.2015.09.030
[6]. Hui-Wen Chang et al., “Nitride Films Deposited from an Equimolar Al–Cr–Mo–Si–Ti Alloy Target by Reactive Direct Current Magnetron Sputtering”, Thin Solid Films, Vol. 516, pp. 6402 – 6408, (2008). DOI: https://doi.org/10.1016/j.tsf.2008.01.019
[7]. Голосов Д.А. и др., “Влияние степени легирования алюминием на механические и триботехнические характеристики пленок нитрида титана алюминия”, Трение и износ, Том 41, № 4, c. 420 - 426, (2020). DOI: https://doi.org/10.32864/0202-4977-2020-41-4-420-426
[8]. Лам Н. Н. и др., “Формирование защитных покрытий на титане методом импульсного реактивного магнетронного распыления”, Международная юбилейная научно-практическая конференция, посвященная 90-летию со дня образования Гомельского Государственного университета имени Франциска Скорины (Гомель, 19–20 ноября 2020 г.): материалы: в 3 ч. Ч. 3 редкол.: С. А. Хахомов (гл. ред.) [и др.], Гомель: ГГУ им. Ф. Скорины, с. 134 - 138, (2020).
