Lê Vũ Nam, Mai Nguyệt Công. Design and fabrication of 2D-grating used in a multi-dimension measurement system. JMST [Internet]. 2022 Dec. 30 [cited 2024 May 4];(FEE):138-45. Available from: https://online.jmst.info/index.php/jmst/article/view/747