Nguyễn Anh D, Nguyễn Đắc N, Nguyễn Việt H, Nguyễn Cao M, Đồng Minh H, Nguyễn Đắc H. Design and simulation of a coplanar capacitive sensor for non-destructive thin-film dielectric measurement. JMST [Internet]. 2024 Feb. 25 [cited 2024 May 12];93(93):55-62. Available from: https://online.jmst.info/index.php/jmst/article/view/1005